DEPOSITION OF OPTICALLY TRANSPARENT COPPER FILMS ON DIELECTRIC SUBSTRATES USING THE PLASMA FOCUS INSTALLATION

Irina Borovitskaya, B.N. KOLOKOLTSEV, B. YA. NIKULIN, G. G. BONDARENKO, I.V. BOROVITSKAYA, P. V. SILIN, B. F. DEGTYAREV
IMET RAS, Moscow, Russian Federation

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