CORRECTION OF THE DISTRIBUTION PROFILES OF THE INTENSITIES OF ELEMENTS CONSIDERING THE UNEVEN DISPERSION OF THE GLOW-DISCHARGE OPTICAL EMISSION SPECTROMETER FOR MULTILAYER COATINGS ANALYSIS

Anton Lomygin, I.A. SHULEPOV, R. S. LAPTEV, E.B. KASHKAROV, M.S. SYRTANOV
National Research Tomsk Polytechnic University, Tomsk, Russian Federation

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