PLASMA-ASSITED DEPOSITION OF DIELECTRIC COATINGS FOR ELECTRICAL INSULATION

Daniil Zuza, V. O. Nekhoroshev, I. A. Kurzina, A. V. Batrakov
Institute of High Current Electronics SB RAS, Tomsk, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
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Tomsk, 634055, RUSSIA

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