THE FORMATION OF MON COATINGS BY VACUUM ARC DEPOSITION IN THE MODE OF PLASMA ASSISTANCE

Nikita Prokopenko, O.V. KRYSINA, V.V. SHUGUROV, S.S. KOVALSKY.
Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences, Tomsk, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
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