FORMATION OF BORON FILM ON SURFACE OF AUSTENITIC STEEL IN SCHEME OF PLASMA-ASSISTED RF-SPUTTERING OF CATHODE FROM BORON

Yurii Ivanov, V. SHUGUROV, A. TERESOV, E. PETRIKOVA, O. TOLKACHEV
Institute of High Current Electronics, Tomsk, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
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