SELF-SUSTAINED MAGNETRON SPUTTERING OF EVAPORATING METAL TARGETS AND ITS INFLUENCE ON THE PROPERTIES OF DEPOSITED COATINGS

Galina Bleykher, V. P. KRIVOBOKOV, D. V. SIDELEV, V. A. GRUDININ, A.S. SHABUNIN, R. V. POPOV
Tomsk Polytechnic University, Tomsk, Russian Federation

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Presentation:
Presentation file

AS
Alexey Serdobintsev 2020-09-17 14:32
Good day. Thank you for interesting poster/presentation representing original mode of magnetron sputtering. Can you tell please, why do you use a MF power source instead of DC? Is SSS mode is possible with pulsed power source only?
GB
Author
Galina Bleykher 2020-09-18 18:18
Thank you very much for your question and interest for our report/
We use MF power supply because we have it. Our experience shows that it works reliably and stably in different modes of magnetron sputtering. But SSS mode can be implemented with any type of power source, including DC.
AS
Alexey Serdobintsev 2020-09-19 16:38
Thank you for your kind and clear answer! I have interested in using SSS mode very much in our magnetron systems. Could I write an e-mail message to you?
GB
Author
Galina Bleykher 2020-09-24 13:42
Yes! OK!

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