TITANIUM SURFACE IMPLANTATION BY MULTICHARGED BISMUTH IONS

Valeria Frolova, A.G. NIKOLAEV, E.M. OKS, G.YU. YUSHKOV
Institute of High Current Electronics SB RAS, Tomsk, Russian Federation

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AS
Andrey Solovyev 2020-09-16 15:57
Valeriya, which method was used to determine depth distribution profiles?
VF
Author
Valeria Frolova 2020-09-16 15:57
The samples were examined by secondary ion mass spectrometry.

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