STUDYING THE REGULARITIES OF FORMING HIGH-INTENSITY BEAMS OF METAL IONS OF LOW AND ULTRA-LOW ENERGY

Alexey Bunin, A.I. Ryabchikov, D.O. Sivin, O.S. Korneva, A.I. Ivanova, S.V. Dektyarev
Tomsk Polytecnic University, Tomsk, Russian Federation

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Daniil Emlin 2020-09-21 17:00
What are a rate of coating deposition, uniformity of coating thickness and the maximal size of detailes obtained by such treatment?
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Alexey Bunin 2020-09-21 17:00
Daniil Emlin 2020-09-18 16:57
What are a rate of coating deposition, uniformity of coating thickness and the maximal size of detailes obtained by such treatment?
I draw your attention to the fact that this talk is aimed at the implantation of low and ultra-low energy ions, and not for refreshment. Research on our low energy ion implantation offers the possibility of alloying various materials at depths of tens and hundreds of micrometers for one hour. We use ion sources with an axially symmetric focusing and ribbon type beams. For uniform ion doping, mutual movement of the ion beam and target irradiation (such as scanning) are required.

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