SURFACE MODIFICATION BY BEAMS AND PLASMA FLOWS OF BORON IONS GENERATED BY VACUUM ARC SOURCES

Konstantin Savkin, A.S. BUGAEV, V.I. GUSHENETS, E.M. OKS, G.YU. YUSHKOV, A.G. NIKOLAEV, V.P. FROLOVA
Institute of High Current Electronics SB RAS, Tomsk, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
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