DISTRIBUTED FERROMAGNETIC ENHANCED ICP FOR LARGE-SCALE PLASMA PROCESSING

Mikhail Isupov, A.V. Fedoseev, N.A. Demin, G.I. Sukhinin
Kutateladze Institute of Thermophysics, SB RAS, Novosibirsk, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
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