STUDYING THE REGULARITIES OF FORMING HIGH-INTENSITY BEAMS OF METAL IONS OF LOW AND ULTRA-LOW ENERGY

Alexey Bunin, A.I. Ryabchikov, D.O. Sivin, O.S. Korneva, A.I. Ivanova, S.V. Dektyarev
Tomsk Polytecnic University, Tomsk, Russian Federation

Go to discussion...
Presentation:
Presentation file
View presentation:

DE
Daniil Emlin 2020-09-21 17:00
What are a rate of coating deposition, uniformity of coating thickness and the maximal size of detailes obtained by such treatment?
AB
Author
Alexey Bunin 2020-09-21 17:00
Daniil Emlin 2020-09-18 16:57
What are a rate of coating deposition, uniformity of coating thickness and the maximal size of detailes obtained by such treatment?
I draw your attention to the fact that this talk is aimed at the implantation of low and ultra-low energy ions, and not for refreshment. Research on our low energy ion implantation offers the possibility of alloying various materials at depths of tens and hundreds of micrometers for one hour. We use ion sources with an axially symmetric focusing and ribbon type beams. For uniform ion doping, mutual movement of the ion beam and target irradiation (such as scanning) are required.

Login to leave comments..

 

News

  • Oct 6, 2020

    Interview with Ashurova Kamilla

    Interview with Ashurova Kamilla (one of diploma-winners of the competition for young scientists) has published
  • Oct 6, 2020

    Interview with Munzar Vojtech

    Interview with Munzar Vojtech (one of winners of the EFRE-2020 grant competition) has published
  • Sep 27, 2020

    Webinars archive

    We have published recordings of oral sessions for Friday (Sep.25, 2020)
  • Sep 26, 2020

    Interviews

    We have published recordings of Interviews
  • Sep 25, 2020

    Webinars archive

    We have published recordings of oral sessions for Thursday (Sep.24, 2020)
  • Sep 24, 2020

    Webinars archive

    We have published recordings of oral sessions for Wednesday (Sep.23, 2020)
  • Sep 23, 2020

    Webinars archive

    We have published recordings of oral sessions for Tuesday (Sep.22, 2020)
  • Sep 22, 2020

    Webinars archive

    We have published recordings of oral sessions for Monday (Sep.21, 2020)
14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
CONTACTS

Institute of High Current Electronics,
2/3 Akademichesky Ave.,
Tomsk, 634055, RUSSIA

Phone: +7 913 886-95-37
Fax: +7 3822 492-410
E-mail: efre2020@hcei.tsc.ru

GPB

vk.com