THE COMBINED PLASMA SWITCH WITH INCREASED SUPPLY VOLTAGE AND HIGH PULSE REPEATITION FREQUENCY

Pavel Gugin, P.A. BOKHAN, V.A. KIM, M.A. LAVRUKHIN, D.E. ZAKREVSKY
Rzhanov Institute of Semiconductor Physics SB RAS, Novosibirsk, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

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