MeSiBCN Me: Ti, Cr, Al, Mo, Zr, Ta NANOFILMS WITH HIGH WEAR-, OXIDATION- AND CORROSION RESISTANCE PRODUCED IN VACUUM USING SHS-CATHODES

Philipp Kiryukhantsev-Korneev, E.A. Levashov
NUST MISIS, Moscow, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
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