PLASMA ASSISTANCE EFFECT ON THE EXAMPLE OF ZrN-BASED COATINGS DEPOSITED BY VACUUM-ARC METHOD AT THE ADDITION OF Al, Ti, Nb

Olga Krysina, N.A. PROKOPENKO, V.V. SHUGUROV, E.A. PETRIKOVA, O.S. TOLKACHEV
Institute of high current electronics SB RAS, Tomsk, Russian Federation

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