POWER SUPPLY FOR SUPERIMPOSED HIGH POWER IMPULSE AND MIDDLE FREQUENCY DUAL MAGNETRON SPUTTERING

Andrey Solovyev, V.O. OSKIRKO, A.N. ZAKHAROV, A.P. PAVLOV, V.A. SEMENOV
Institute of High Current Electronics SB RAS, Tomsk, Russian Federation

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14 - 26 SEPTEMBER
EFRE 2020
7th International Congress on
Energy Fluxes and
Radiation Effects

TOMSK, RUSSIA
CONTACTS

Institute of High Current Electronics,
2/3 Akademichesky Ave.,
Tomsk, 634055, RUSSIA

Phone: +7 913 886-95-37
Fax: +7 3822 492-410
E-mail: efre2020@hcei.tsc.ru

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